| 高钰航,葛春桥,陈露,李强,丁金铎.晶硅异质结光伏技术中透明导电氧化物靶材的研究进展与挑战[J].有色金属材料与工程,2026,47(1):54-63. |
| 晶硅异质结光伏技术中透明导电氧化物靶材的研究进展与挑战 |
| Research progress and challenges of transparent conductive oxide sputtering targets in crystalline silicon heterojunction photovoltaic technology |
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| DOI：10.13258/j.cnki.nmme.20250604001 |
| 中文关键词: 晶硅异质结电池 透明导电氧化物薄膜 溅射靶材 |
| 英文关键词:crystalline silicon heterojunction cell transparent conductive oxide thin film sputtering target |
| 基金项目:中山市科技计划资助项目（LJ2021006；CXTD2022005；2022A1009） |
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| 摘要点击次数: 507 |
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| 中文摘要: |
| 晶硅异质结（heterojunction, HJT）电池凭借其低温工艺兼容性、高开路电压及优异温度系数，成为突破钝化发射极和背面电池（passivated emitter and rear cell, PERC）与隧穿氧化层钝化接触电池（tunnel oxide passivated contact, TOPCon）效率瓶颈的第三代光伏技术。然而，HJT电池的效率极限与产业化进程高度依赖透明导电氧化物（transparent conductive oxide, TCO）层的多功能协同。当前主流高迁移率靶材通过优化导带色散，电池效率接连突破，同时铟资源约束推动无铟化技术发展。在产业化方面，物理气相沉积（physical vapor deposition, PVD）以高沉积速率及国产化设备主导量产，而反应等离子体沉积（reactive plasma deposition, RPD）通过低能粒子实现薄膜晶格匹配，迁移率较PVD大幅提升，但受限于进口设备成本与低靶材利用率。未来技术突破将驱动靶材性能从实验室向量产精准映射。通过卷对卷（roll-to-roll, R2R）工艺集成与钙钛矿/硅叠层光谱协同，HJT技术有望实现推动光伏产业向高效低碳跨越式发展。 |
| 英文摘要: |
| Crystalline silicon heterojunction (HJT) cells, recognized as third-generation photovoltaic technology, overcome the efficiency limitations of PERC and TOPCon through low-temperature process compatibility, high open-circuit voltage, and superior temperature coefficients. Their efficiency ceiling and industrialization process rely critically on multifunctional coordination within transparent conductive oxide (TCO) layers. High-mobility sputtering targets optimized via conduction band dispersion have enabled efficiency breakthroughs, while indium scarcity drives indium-free TCO development. Industrially, physical vapor deposition (PVD) dominates manufacturing due to high deposition rates and localized equipment, whereas reactive plasma deposition (RPD) achieves higher mobility through low-energy particle-induced lattice matching but faces constraints from imported equipment costs and low target utilization. Future advancements demand precise laboratory-to-production mapping of target properties, with roll-to-roll (R2R) process integration and perovskite/silicon tandem spectral synergy poised to propel HJT-based high-efficiency, low-carbon photovoltaic industrialization. |
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