| 刘新宽,邓志祥,吴郅轩,孙艳.提高金属氧化物半导体气体传感器抗湿稳定性的方法研究[J].有色金属材料与工程,2025,46(1):57-66. |
| 提高金属氧化物半导体气体传感器抗湿稳定性的方法研究 |
| Research on the strategies to improve the moisture resistance stability of metal oxide semiconductor gas sensor |
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| DOI：10.13258/j.cnki.nmme.20240323001 |
| 中文关键词: 金属氧化物半导体 抗湿性能 吸附氧 气体传感器 |
| 英文关键词:metal oxide semiconductor moisture resistance absorbed oxygen gas sensor |
| 基金项目:上海市自然科学基金资助项目（23ZR1473300） |
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| 摘要点击次数: 18 |
| 全文下载次数: 24 |
| 中文摘要: |
| 测试环境中的水汽会干扰金属氧化物半导体气敏材料的气敏反应，导致基线电阻漂移、响应灵敏度降低等问题，从而显著影响传感器对目标气体的检测。对水汽干扰气体传感器气敏反应的机制进行了简要阐述，重点对当前抗湿检测的思路进行了归纳总结。当前较为广泛开发的抗湿检测思路包括筛滤作用、捕水作用、传感器表面调控3大类，不同抗湿思路的组合可实现金属氧化物半导体气敏材料抗湿维稳和响应性能的同步提升。 |
| 英文摘要: |
| Water vapor in the test environment will interfere with the gas-sensing response of metal oxide semiconductor gas-sensitive materials, leading to several issues such as baseline resistance drift and reduced response sensitivity, which significantly impacts the detection of target gases by sensors. The mechanism that water vapor interferes with gas sensitive reaction of the gas sensor is briefly described. The current ideas of moisture resistance detection are summarized emphatically. The moisture resistance detection ideas are widely developed, including screening effects, water trapping effects and sensor surface modulation. The combination of different moisture resistance ideas can realize the simultaneous improvement of moisture resistance stability and response performance of metal oxide semiconductor gas-sensitive materials. |
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